IEC/TS 61945-2000 集成电路生产线批准工艺和失效分析方法
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【英文标准名称】:Integratedcircuits-Manufacturinglineapproval-Methodologyfortechnologyandfailureanalysis
【原文标准名称】:集成电路生产线批准工艺和失效分析方法
【标准号】:IEC/TS61945-2000
【标准状态】:现行
【国别】:国际
【发布日期】:2000-03
【实施或试行日期】:
【发布单位】:国际电工委员会(IEC)
【起草单位】:IEC/SC47A
【标准类型】:()
【标准水平】:()
【中文主题词】:企业;认可;集成电路;电子设备及元件;质量;失败分析;质量管理;电子工程;生产线;误差分析
【英文主题词】:erroranalysis;enterprises;quality;manufacturinglines;failureanalysis;approval;electronicengineering;qualitymanagement;electronicequipmentandcomponents;integratedcircuits
【摘要】:Thistechnicalspecificationgivesthemethodologyfortechnologyandfailureanalysisinmanufacturingintegratedcircuits.Takingintoaccountthelevelofcomplexityoftechniquesandmeanstobeused,thepresenttechnicalspecificationcoverstheclassificationofseverallevelsoftechnologyanalysisthatmaybeusedforsemiconductorsanddefinesforeachlevel:-theobjectivetobeperformed(orgoal);-thepointstobeinvestigated;-thetoolsandtechniquesneededforcurrentlyavailabletechnologiestoperformtheseobjectives.Technologyanalysisisusedtodeterminethewayacomponentisbuiltbyobservingitusingadequateresolution,whichincreasesprogressivelywiththelevelofanalysis.Inaddition,itallowsdetectionofanyfaultpotentiallyaffectingthereliabilityofthedevicesundertypicalworkingconditions.Itmaybeusedtoverifytheconformanceofadevicetoitsmanufacturingdocuments,butmayalsobeusedtodeterminethephysicalandchemicalcharacteristicsofthedeviceundertest.Thepointsobservedduringtheanalysiscanalsoserveasguidelinesforanexpertinafuturequalityauditofamanufacturingline.Byusingsimilarorcase-specificmeans,thefailureanalysisleadstoidentifyingthephysicalreasonsofafailurefoundinadeviceduringatestorduringnormalworkingconditions.Throughadeepknowledgeofthecomponentandofitsintrinsicfailuremechanisms,thetechnologyanalysiscanprepareforfuturefailureanalyses.Thistechnicalspecificationisconsideredasasuitabletestmethodologywhenreferredtoinanapplicationdocument.Suchdocumentsshallindicatethespecificconditionsforitsapplication.
【中国标准分类号】:L56
【国际标准分类号】:31_200
【页数】:12P;A4
【正文语种】:英语
【原文标准名称】:集成电路生产线批准工艺和失效分析方法
【标准号】:IEC/TS61945-2000
【标准状态】:现行
【国别】:国际
【发布日期】:2000-03
【实施或试行日期】:
【发布单位】:国际电工委员会(IEC)
【起草单位】:IEC/SC47A
【标准类型】:()
【标准水平】:()
【中文主题词】:企业;认可;集成电路;电子设备及元件;质量;失败分析;质量管理;电子工程;生产线;误差分析
【英文主题词】:erroranalysis;enterprises;quality;manufacturinglines;failureanalysis;approval;electronicengineering;qualitymanagement;electronicequipmentandcomponents;integratedcircuits
【摘要】:Thistechnicalspecificationgivesthemethodologyfortechnologyandfailureanalysisinmanufacturingintegratedcircuits.Takingintoaccountthelevelofcomplexityoftechniquesandmeanstobeused,thepresenttechnicalspecificationcoverstheclassificationofseverallevelsoftechnologyanalysisthatmaybeusedforsemiconductorsanddefinesforeachlevel:-theobjectivetobeperformed(orgoal);-thepointstobeinvestigated;-thetoolsandtechniquesneededforcurrentlyavailabletechnologiestoperformtheseobjectives.Technologyanalysisisusedtodeterminethewayacomponentisbuiltbyobservingitusingadequateresolution,whichincreasesprogressivelywiththelevelofanalysis.Inaddition,itallowsdetectionofanyfaultpotentiallyaffectingthereliabilityofthedevicesundertypicalworkingconditions.Itmaybeusedtoverifytheconformanceofadevicetoitsmanufacturingdocuments,butmayalsobeusedtodeterminethephysicalandchemicalcharacteristicsofthedeviceundertest.Thepointsobservedduringtheanalysiscanalsoserveasguidelinesforanexpertinafuturequalityauditofamanufacturingline.Byusingsimilarorcase-specificmeans,thefailureanalysisleadstoidentifyingthephysicalreasonsofafailurefoundinadeviceduringatestorduringnormalworkingconditions.Throughadeepknowledgeofthecomponentandofitsintrinsicfailuremechanisms,thetechnologyanalysiscanprepareforfuturefailureanalyses.Thistechnicalspecificationisconsideredasasuitabletestmethodologywhenreferredtoinanapplicationdocument.Suchdocumentsshallindicatethespecificconditionsforitsapplication.
【中国标准分类号】:L56
【国际标准分类号】:31_200
【页数】:12P;A4
【正文语种】:英语
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